Effect of Plasma Treatment on Surface and Morphology of Au/Cr/Glass Multilayers

چکیده مقاله

In this work, the effect of plasma treatment on the surface morphology of Au/Cr/Glass multilayers and adhesion of the Au/Cr layers on glass substrate was studied with scanning electron microscopy for application in surface plasmon resonance (SPR) sensor chips. The plasma treatment was modified to introduce controlled defects and functionalities to the samples to give tunable properties. The results shown that the plasma treatment improves the adhesion of Au/Cr layers on a glass substrate. The SEM figure showed that substrate modification has no noticeable influence on the surface morphology of chips.