Self-ordered nanopore arrays through hard anodization assisted by anode temperature ramp

Abstract

In the present work, hard anodization assisted by anode temperature ramp was employed to fabricate selfordered nanoporous alumina in the wide range of interpore distances (259–405 nm) in pure oxalic acid and mixture of oxalic and phosphoric acid solutions. Anode temperature ramp technique was employed to adjust the anodization current density to optimize the self-ordering of the nanopore arrays in the interpore range in which no ordered selfassembled hard anodized anodic aluminum oxide has reported. It is found that the certain ratios of oxalic and phosphoric acid solutions in this anodization technique increased self-ordering of the nanopores especially for anodization voltages over the 170 V by increasing alumina’s viscous flow which could lead to decrease the overall current density of anodization, yet leveled up by anode temperature ramp. However, below 150 V anodization voltage, the ratio of interpore distance to the anodization voltage of the both anodization techniques was the same (*2 nm/V), while above this voltage, it increased to about 2.2 nm/V.