Investigation on rotary ultrasonic assisted end grinding of silicon nitride ceramics

Abstract

In this study, rotary ultrasonic assisted end grinding (RUAEG) of silicon nitride (Si3N4) was discussed. In addition, comparison of RUAEG with conventional end grinding was carried out. Machining parameters effect on the process was experimentally and statistically distinguished. Moreover, interaction of the influential parameters was discussed and the optimum condition was obtained. It is concluded from interaction plots that ultrasonic vibration influence on surface roughness was greater in lower cutting depths and higher rotational speeds. Moreover, by RUAEG process, it could acquire higher material removal speed with lower thrust force. Exerting ultrasonic vibration on the tool was more influential comparing to other grinding parameters. From morphological examinations, that was concluded RUAEG of ceramics results in lower amount of scratches, diminishing grinding lines and smoothing the surface due to be knocked continuously by the tool.