Nonlinear Finite Element Modeling of Nanoindentation to Simulate Contact Behavior in Film-Substrate Interface

چکیده مقاله

In this study, a film/substrate, friction contact model was developed using ANSYS, in order to observe whether a difference of the calculated mechanical properties of thin films exists between film/substrate interfaces with friction contact and perfectly bonded interfaces. The thin film/substrate material system examined in FE analysis was SiO2/Si. Hence, the film/substrate-perfectly-bonded model with a fixed specimen simulation width was first set up and convergent tests had to be conducted to find an accurate and reasonable simulation width. Then the friction contact was defined at the film/substrate interface using the determined simulation width of the specimen. Finally, the presented nanoindentation film-substrate frictional contact model can also be utilized for micro and macro indentations when the dimensional parameters are changed correspondingly.